17.4 Summary The present study confirmed our previous preposition that the treated specimen had a resonance-like peak in the frequency dependence of the film surface oscillation, and thereby could exhibit greater oscillation amplitude than the untreated specimen when driven at or near the resonant frequency. The dual-beam Michelson interferometer setup along with the transducer calibration provided us with the opportunity to conduct the interferometric experiment under better-controlled conditions. The untreated specimen also exhibited a resonance-like behavior at a higher frequency. The treated specimen’s resonance curve seems to be broader than the untreated case, agreeing with our previous observation made with the use of Doppler Vibrometry at a single driving frequency. Acknowledgement The present study was supported by the National Research Foundation of Korea (NRF) grants funded by the Korean government MEST, NRF-2013R1A2A2A05005713, NRF-2013M2A2A9043274. References 1. S. Yoshida, S. Adhikari, K. Gomi, R. Shrestha, D. Huggett, C. Miyasaka, I. Park, Opto-acoustic technique to evaluate adhesion strength of thinfilm systems. AIP Adv. 2(2), 022126-1–022126-7 (2012) 2. D. Didie, D. Didie, B. Ghimire, K. Kabza, S. Adhikari, S. Yoshida, C. Miyaska, I.-K. Park, Optical interferometry for evaluation of adhesion strength of thin-film systems. Advancement of Optical Methods in Experimental Mechanics, vol. 3, Conference Proceedings of the Society for Experimental Mechanics Series, pp. 259–266 (2014) 3. J.N. Kim, R. Tutwiler, D.R. Kwak, I.-K. Park, C. Miyasaka, Multilayer transfer matrix characterization of complex materials with scanning acoustic microscopy. Proc. SPIE 8694, Nondestructive Characterization for Composite Materials, Aerospace Engineering, Civil Infrastructure, and Homeland Security 2013, 86941O (2013) 4. S. Yoshida, D. Didie, D. Didie, S. Adhikari, I.-K. Park, Opto-acoustic technique to investigate interface of thin-film systems. SEM 2014 Annual Conference, June 2–5, 2014 Greenville, SC (2014) 5. Q. Liao, J. Fu, X. Jin, Single-chain polystyrene particles adsorbed on the silicon surface: a molecular dynamics simulation. Langmuir 15, 7795–7801 (1999) 6. M. Basnet, S. Yoshida, B.R. Tittmann, A.K. Kalkan, C. Miyasaka, Quantitative nondestructive evaluation for adhesive strength at an interface of a thin film system with opto-acoustic techniques. 47th Annual Technical Meeting of Society of Engineering Science, Oct 4–6, Iowa State University, Ames, IA (2010) 0.06 1 0.8 0.6 0.4 0.2 0 0.05 0.04 0.03 0.02 0.01 0 6 7 8 untreat 2/2/15, 2/27/15 treat 1/27/15, 2/27/15 bare Si left 2/4/15 bare Si right 2/4/15 untreat 2/2/15, 2/27/15 treat 1/27/15, 2/27/15 bare Si left 2/4/15 bare Si right 2/4/15 9 10 driving freq (kHz) peak ratio (raw) peak ratio (raw) driving freq (kHz) 11 12 13 14 7 8 9 10 11 12 13 14 Fig. 17.8 Spectrum peak observed with treated and untreated Ti-Pt specimen along with Bare Si. Theleft plots present raw data and theright plots are normalized to the maximum of each data series 17 Nondestructive Characterization of Thin Film System with Dual-Beam Interferometer 137
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