While the dis which of the down as show level using th ing away from proaching the Figs. 3 and 4 of the present ied relatively performance splacement da following cat wn in Fig. 2(a he proportiona m the magnet e magnet to ac show the exp t method is tha y a lot. The ra of the microc ata is measure tegories the pr a). Then the p al-integral-deri to suppress th ctivate the vibr perimental resu at the vibratio ange of the all computer, and ed and stored resent status is pulse width m ivative contro he vibration. O ration. Fig. 3 Fig. 4 ults of the free n control can lowable variat other auxiliar in the memory s : equilibrium modulation sign l concept. Tha On the other h Vibration sup 4 Vibration ac e vibration sup be achieved e tion depends o ry electronic p ry of the micro m (zero) point nals are appro at is, the electr hand the electr ppression ctivation ppression and ven when the on the detaile parts and circu ocomputer the , positive peak opriately gene romagnet is a romagnet is ac amplification dynamic char d design of th uits designs. I e control prog k, negative pe erated to contr ctuated while ctuated while n, respectively racteristics of t he control sys In order to ver gram determin eak, going up rol the vibratio the beam is g the beam is a . The advanta the beam is va tem such as th rify this featur nes or on goapge arhe re, 309
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