also be modi beam be varie placed to sup ified by addin ed. The laser s press or ampli ng some additi sensor measur ify the vibratio (a) De ional masses, res the displac on level of the etermination o (b) Electr Fig. 2 Overv e.g., by attac cement at a po e beam in real- f the position romagnet driv view of the Con ching magnets int of the beam -time. and the veloci ving PWM sign ntrol Procedur s so that the d m and on the o ity of the beam nals re dynamic chara other side an e m acteristics of th electromagnet he t is 308
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