MEMS and Nanotechnology, Volume 2

factor, the effect of damping on power decrease becomes significant. Controlling the damping ratio is an important design factor for piezoelectric cantilevers to operate stably at higher temperature. ACKNOWLEDGMENTS This research was partially supported by Auburn University Detection and Food Safety Center funded by USDA-CSREES. REFERENCES [1] Tan, Qi, Li, Jie-Fang, and Viehland, Dwight, Ferroelectric behaviours dominated by mobile and randomly quenched impurities in modified lead zirconate titanate ceramics, Philosophical Magazine B, Vol. 76 No. 1 pp. 59-74, 1997. [2] Sabat, Ribal Georges et al, Temperature dependence of the complete materials coefficients matrix of soft and hard doped piezoelectric lead zirconate titanate ceramics, J. Appl. Phys., Vol. 101 064111, 2007. [3] Wolf, R. A., Trolier-McKinstry, S., Temperature dependence of the piezoelectric response in lead zirconate titanate films, J Appl Phys Vol. 95 pp. 1397-1406, 2004. [4] Julian, Christelle and Viehland, Dwight, Comparison of polarization switching in “hard,” “soft,” and relaxor ferroelectrics, J. Appl. Phys., Vol. 95 No. 8 pp. 4316-4318, 2004. [5] Roundy, Shad, Wright, Paul K., and Rabaey, Jan M., A study of low vibrations as a power source for wireless sensor nodes, Computer Communications, Vol. 26 pp. 1131-1144, 2003. [6] Roundy, Shad, Wright, Paul K., and Rabaey, Jan M., Energy Scavenging for Wireless Sensor Networks, Kluwer Academic Publishers, pp. 51-85, 2004. [7] Rao, Singiresu S., Mechanical Vibrations 4th ed., Pearson Prentice Hall, p. 234, 2004. [8] Chen, Shih-Nung, Wang, Gou-Jen and Chien, Ming-Chun, Analytical modeling of piezoelectric vibration-induced micro power generator, Mechatronics, Vol. 16 pp. 379-387, 2006. [9] Shen, Dongna, Choe, Song-Yul and Kim, Dong-Joo, The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting, Jpn. J. Appl. Phys., Vol. 46 pp. 6755-6760, 2007. [10] Gubinyi, Z. et al., Electrical properties of PZT piezoelectric ceramic at high temperatures, J. Electroceram., Vol. 20 pp. 95-105, 2008. 31

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