MEMS and Nanotechnology, Volume 2

MEMS and Nanotechnology, Volume 2	4
Preface	6
Contents	8
Nanomechanical standards based on the intrinsic mechanics of molecules and atoms	12
Magneto-Mechanical MEMS Sensors for Bio-Detection	19
Recent Progress of Piezoelectric MEMS for Energy Harvesting Devices	26
Performance of Piezoelectric Power Generator in Environmental Conditions	33
Comparison of Transduction Efficiency for Energy Harvester between Piezoelectric Modes	40
Size Effects Associated with Microcompression Experiments on Single-Crystal Magnesium	47
Mechanically probing time-dependent mechanics in metallic MEMS	49
Small mass measurements for tuning fork-based atomic force microscope cantilever spring constant calibration	55
Linear and Nonlinear Mass Sensing Using Piezoelectrically-Actuated Microcantilevers	63
Calibrating Force and Displacement in the Face of Property Variation	72
Standardization of Nanoscale Interfacial Experiments Using MEMS	80
Arrays of Robust Carbon Nanotube-Based NEMS: A Combined Experimental/Computational Investigation	85
Electro-Mechanical Response of Carbon Nanotube Reinforced Polymer Composites	87
A Test Platform for Systematic Investigation of Tribology in MEMS	89
Full Optical Scatter Analysis for Novel Photonic and Infrared Metamaterials	100
Thermal Management and Metamaterials	109
MEMS integrated metamaterial structure having variable resonance for RF applications	116
Characterization and Testing of Adaptive RF Metamaterial Structure Using MEMS	122
Design of a microfluidic pump, based on conducting polymers	129
Micromotor Fabrication by Surface Micromachining Technique.	139
Improvement of Piezoresistive Microcantilever Beams for Gas Detection and Sensing	147
Investigation of the Young’s Modulus of Fibers in an Electrospun PCL Scaffold Using AFM and its Correlation to cell Attachment	156
Recent Progress in E-Beam Lithography for SEM Patterning	162
Analysis of Scattering-type Scanning Near-field Optical Microscopy for Residual-strain Measurements	166
Experimental Methods for Tensile Testing of Metallic Thin Films at High Temperatures	171
Surface Texturing Using Gold Nanoparticles to Reduce Adhesion in MEMS	179
Design of Microswitch Systems Avoiding Stiction due to Surface Contact	186
Measurement of adhesive force between two mica surfaces with multiple beam interferometry	193
Performance Studies of A Prototypical MEMS Thermal Actuator	198
A New Electrothermal Microactuator with Z-shaped Beams	204
Electrothermal Actuators for Integrated MEMS Safe and Arming Devices	209
Contrast Reversal on Surface Plasmon Resonance Reflectivity in Nickel and Nickel Alloy Films	217
Effect of Accelerated Ultra Violet and Thermal Exposure on Nano Scale Mechanical Properties of Nylon Fibers	223
High Thermal Conductivity Polyurethane-Boron Nitride Nanocomposite Encapsulants	230
Advanced hard mask approach of ICs copper interconnects processes integration	236
Advances in Thin Film Nanoindentation	246
Mechanical and Piezoelectric Behavior of Thin Film PZT Composites for MEMS Applications	254
FRACTURE BETWEEN SELF-ASSEMBLED MONOLAYERS	260
Control and Quantification of Residual Stresses in Anodically Bonded MEMS Structures	261
Sub-micron Scale Mechanical Properties of Polypropylene Fibers Exposed to Ultraviolet and Thermal Degradation	266

RkJQdWJsaXNoZXIy MTMzNzEzMQ==