MEMS and Nanotechnology, Volume 2

REFERENCES: 1. Roundy S, Wright PK, Rabaey, J (2003) A study of low level vibrations as a power source for wireless sensor nodes. Comput Commun 26:1131-1144. 2. Mitcheson PD, Green TC, Teatman EM, Holmes AS (2004) Architectures for vibration-driven micropower generators. J Micro Sys:13:429-440. 3. Torah RN, Beeby SP, Tudor MJ, O'Donnel T, Roy S (2006) Kinetic energy harvesting using micro scale electromagnetic generators. In Proceedings of the 17th MicroMechanics Europe, UK. 4. Shen D, Choe SY, Kim DJ (2007) Analysis of piezoelectric materials for energy harvesting devices under highg vibrations. Jap J Appl Phys 46:6755-6760. 5. Shen D, Park JH, Ajitsaria J, Choe SY, Wikle HC, Kim DJ (2008) Design, fabrication and evaluation of a mems pzt cantilever with an integrated si proof mass for vibration energy harvesting. J Micromech Microeng 18:055017. 6. Shen D, Park JH, Noh JH, Choe SY, Kim SH, Wikle HC, Kim DJ (2009) Micromachined PZT cantilever based on SOI structure for low frequency vibration energy harvesting. Sens Actuators A 154:103-108. 7. Marzencki M, Ammar Y, Basrour S (2007) Integrated power harvesting system including a mems generator and a power management circuit. In Proceedings of International Conference on Solid-State Sensors, Actuators and Microsystems:887-890. 8. Fang HB, Liu JQ, Xu ZY, Dong L, Wang L, Chen D, Cai BC, Liu Y (2006) Fabrication an dperformance of mems-based piezoelectric power generator for vibration energy harvesting. Microelect J 37:1280-1284. 9. Jeon YB, Sood R, Jeong JH, and Kim SG (2005) MEMS power generator with transverse mode thin film pzt. Sen and Actuators A 122:16-22. 10. Baker J, Roundy S, Wright P (2005) Alternative geometries for increasing power density in vibration energy scavenging for wireless sensor networks. In Proceedings of the 3rd International Energy Conversion Engineering Conference. San Freansico, USA. 11. Torah R, Glynne-Jones, P, Tudor M, O'Donnell T, Roy S, Beeby S (2008) Self-powered autonomous wireless sensor node using vibration energy harvesting. Meas Sci Technol 19:125202. 12. Lee BS, Lin SC, Wu WJ, Wang XY, Chang PZ, Lee CK (2009) Piezoelectric MEMS generators fabricated with an aerosol deposition PZT thin film. J Micromech Microeng 19: 065014. 13. Ando T, Li X, Nakao S, Kasai T, Tanaka H, Shikida M, Sato K (2005) Fracture toughness measurement of thin-film silicon. Fatigue Fract Eng Mater Struct 28: 687-694. 14. Zheng X, Zhou Y, Yan Z (2003) Dependence of crystalline, ferroelectric and fracture toughness on annealing in Pb(Zr0.52Ti0.48)O3 thin films deposited by metal organic decomposition. J Mat Res 6: 551-556. 23

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