Measurement Due to its structural symmetry, the viewing range of the thermal camera was adjusted to cover half of the actuator for better spatial resolution. Thermal images were acquired at various states of actuation and then postprocessed using a Matlab routine to display temperature fields according to the assigned colormap. Examples of the temperature fields at 3, 5 and 7 V excitation are shown in Figure 7. Detailed temperature profiles along the shuttle and beams of the 7 V excitation are plotted in Figure 7(c). The temperatures of two inner beams (#2 and 3) are generally the same and higher than the temperatures of two outside beams (#1 and 4). The hottest region of #2 (or #3) is about 2.5 to 3.0 mm from the shuttle, which is not exactly at the midpoint of the beam. The maximum temperature is close to 600 oK. (a) 3 V (b) 5 V 0 1 2 3 4 5 6 400 450 500 550 600 Temperature, K Position, mm 1 2 3 4 0 0.5 1 400 450 Temperature, K Position, mm 5 (c) 7 V Figure 7 Temperature (unit: oK) profiles of the bent beams and shuttle at (a) 3 V, (b) 5 V and (c) 7 V. 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 2000 4000 6000 8000 10000 V/Vo, d/do Time, ms Excitation V/Vo Displacement d/do 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 200 400 600 800 1000 V/Vo, d/do Time, ms Excitation V/Vo Displacement d/do (a) (b) Figure 8 High speed imaging Figure 9 Normalized excitation and displacement at (a) 0.1 and (b) 5.0 Hz. and data acquisition (Vo = 4.0 V, do = 95 um). 206
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