262 Y. Meng et al. Fig. 33.4 Comparison of simulated and measured center-point diaphragm displacement at (a, d) 4 kHz, (b, e) 36 kHz, and (c, f) 96.8 kHz 4-cycle tone-burst signal with a peak-to-peak voltage of 70 volts. The frequency of 70 kHz chosen for this demonstration corresponds to the fundamental resonance frequency of the diaphragm. The actuator signal and the resulting center-point diaphragm displacement of the MEMS diaphragm are presented in Fig. 33.6b. The diaphragm ramps up to a steady-state peak-to-peak displacement of 6.2 .μm. Referring to the rightmost axis in Fig. 33.6b, the positive displacement cycle (i.e., upward displacement) is approximately 2.7.μm, at which point the diaphragm makes physical contact with the backplate. The negative (i.e., downward) displacement reaches a value greater than 3.0.μm as the momentum of the diaphragm carries
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