264 Y. Meng et al. 33.3 Conclusions and Future Work When used as actuators, MEMS microphones have been shown to be effective at generating peak-to-peak diaphragm displacements greater than 2.μm across a range of frequencies. The state-space model, which addresses several nonlinear system aspects, predicts the large-signal dynamics of MEMS microphones accurately. Given the proven capabilities of the model, we now wish to apply the model to design dense arrays of CMUT transducers for the generation of high-amplitude ultrasound in air (e.g., SPL.>140 dB). Before doing so, we will add bending stiffness to the model equations. The first generation of the model, as is used for the simulations presented herein, is limited to stress-dominated membranes. Many transducers are bending-dominated and we wish to explore this design space as well. References 1. Horsley, D.A., Przybyla, R.J., Kline, M.H., Shelton, S.E., Guedes, A., Izyumin, O., Boser, B.E.: Piezoelectric micromachined ultrasonic transducers in consumer electronics: the next little thing? In: Proceedings of the 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 145–148. IEEE, Piscataway (2016) 2. Zhang, H., Liang, D., Wang, Z., Ye, L., Rui, X., Zhang, X.: Fabrication and characterization of a wideband low-frequency CMUT array for air-coupled imaging. IEEE Sensors J. 20(23), 14090–14100 (2020) 3. Przybyla, R.J., Shelton, S.E., Guedes, A., Krigel, R., Horsley, D.A., Boser, B.E.: In-air ultrasonic rangefinding and angle estimation using an array of ALN micromachined transducers. (2012) 4. Halbach, A., Gijsenbergh, P., Jeong, Y., Devriese, W., Gao, H., Billen, M., Torri, G.B., Chare, C., Cheyns, D., Rottenberg, X. et al.: Display compatible PMUT array for mid-air haptic feedback. In: Proceedings of the 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS 2019 & EUROSENSORS XXXIII), pp. 158–161. IEEE, Piscataway (2019) 5. Apte, N., Park, K.K., Nikoozadeh, A., Khuri-Yakub, B.T.L Bandwidth and sensitivity optimization in CMUTs for airborne applications. In: Proceedings of the 2014 IEEE International Ultrasonics Symposium, pp. 166–169. IEEE, Piscataway (2014) 6. Park, K.K., Oralkan, O., Khuri-Yakub, B.T.: Comparison of conventional and collapse-mode CMUT in 1-D array configuration. In: Proceedings of the 2011 IEEE International Ultrasonics Symposium, pp. 1000–1003. IEEE, Piscataway (2011) 7. Olcum, S., Yamaner, F.Y., Bozkurt, A., Köymen, H., Atalar, A.: CMUT array element in deep-collapse mode. In: Proceedings of the 2011 IEEE International Ultrasonics Symposium, pp. 108–111. IEEE, Piscataway (2011) 8. Olcum, S., Yamaner, F.Y., Bozkurt, A., Atalar, A.: Deep-collapse operation of capacitive micromachined ultrasonic transducers. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 58(11), 2475–2483 (2011) 9. Bayram, B., Oralkan, O., Ergun, A.S., Haeggstrom, E., Yaralioglu, G.G., Khuri-Yakub, B.T.: Capacitive micromachined ultrasonic transducer design for high power transmission. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 52(2), 326–339 (2005) 10. Satir, S., Zahorian, J., Degertekin, F.L.: Transmit optimization of CMUTs in non-collapse mode using a transient array model. In: Proceedings of the 2012 IEEE International Ultrasonics Symposium, pp. 85–88. IEEE, Piscataway (2012) 11. Satir, S., Xu, T., Degertekin, F.L.: Model based drive signal optimization of CMUTs in non-collapse operation and its experimental validation. In: Proceedings of the 2013 IEEE International Ultrasonics Symposium, pp. 295–298. IEEE, Piscataway (2013) 12. Enhos, K., Tasdelen, A.S., Yilmaz, M., Atalar, A., Koymen, H.: Transmitting CMUT arrays without a DC bias. In: Proceedings of the 2019 IEEE International Ultrasonics Symposium, pp. 750–753. IEEE, Piscataway (2019) 13. Khan, T.M., Tasdelen, A.S., Yilmaz, M., Atalar, A., Koymen, H.: Beam steering in a half-frequency driven airborne CMUT transmitter array. In: Proceedings of the 2019 IEEE International Ultrasonics Symposium, pp. 762–765. IEEE, Piscataway (2019) 14. Khan, T.M., Tasdelen, A.S., Yilmaz, M., Atalar, A., Köymen, H.: High-intensity airborne CMUT transmitter array with beam steering. J. Microelectromech. Syst. 29(6), 1537–1546 (2020) 15. Niu, X., Liu, Z., Meng, Y., Hodges, C.M., Williams, R.P., Hall, N.A.: An air-coupled electrostatic ultrasound transducer using a mems microphone architecture. J. Microelectromech. Syst. 31(5), 813–819 (2022) 16. Williams, R.P., Vatankhah, E., Hall, N.A.L Multidegree-of-freedom state-space modeling of nonlinear pull-in dynamics of an electrostatic mems microphone. J. Microelectromech. Syst. 31(4), 589–598 (2022) 17. Gan, W.-S., Yang, J., Kamakura, T.: A review of parametric acoustic array in air (2012). Parametric Acoustic Array: Theory, Advancement and Applications 18. Coutant, Z.A., Adelegan, O., Biliroglu, A.O., Jeng, G.S., Pitre, J.J., Kirby, M.A., Pelivanov, I., Yamaner, F.Y., O’Donnell, M. and Oralkan, Ö.: Wideband air-coupled CMUT arrays for acoustic micro-tapping. In: 2020 IEEE International Ultrasonics Symposium (IUS), pp. 1–3 (2020)
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