MEMS and Nanotechnology, Volume 8

Preface	6
Contents	8
Chapter 1: Newly Discovered Pile Up Effects During Nanoindentation	9
1.1 Introduction	9
1.2 Experimental Procedure	10
1.3 Results and Discussion	10
1.4 Conclusions	13
References	13
Chapter 2: Spring Constant Characterization of a Thermally Tunable MEMS Regressive Spring	14
2.1 Introduction	14
2.2 Design	15
2.3 Fabrication	16
2.3.1 Resistor Fabrication	16
2.3.2 Backside Etch Process	16
2.4 Modeling and Simulation	17
2.4.1 Finite Element Analysis (FEA)	19
2.5 Experimental Results and Testing	19
2.6 Conclusion	21
References	21
Chapter 3: Shape Optimization of Cantilevered Devices for Piezoelectric Energy Harvesting	23
3.1 Introduction	23
3.2 Methodology	24
3.3 Results and Discussion	25
3.4 Conclusions	29
References	29
Chapter 4: Bonded Hemishell Approach to Encapsulate Microdevices in Spheroidal Packages	31
4.1 Introduction	9
4.2 Background	10
4.3 Approach	10
4.4 Methodology	13
4.5 Results	34
4.6 Conclusion	39
References	13
Chapter 5: Development of an Infrared Direct Viewer Based on a MEMS Focal Plane Array	41
5.1 Introduction	41
5.2 Methods	43
5.2.1 Reflectometry	43
5.2.2 Nomarksi Differential Interference Contrast (DIC)	44
5.2.3 Holography	45
5.3 Results	45
5.3.1 Reflectometry	46
5.3.2 Nomarski DIC	46
5.3.3 Holography	47
5.4 Conclusions and Future Work	48
References	49
Chapter 6: Modeling and Testing RF Meta-Atom Designs for Rapid Metamaterial Prototyping	50
6.1 Introduction	50
6.2 Design	51
6.3 Finite Element Method Modeling	53
6.4 Testing	54
6.5 Results	55
6.6 Conclusion	57
References	58
Chapter 7: Pyroelectric AlN Thin Films Used as a MEMS IR Sensing Material	59
7.1 Introduction	59
7.2 Theoretical Background	60
7.3 Material Characterization	60
7.4 Micro-mechanical Research Effort	67
7.5 Conclusions and Future Work	69
References	70
Chapter 8: In Situ Energy Loss and Internal Friction Measurement of Nanocrystalline Copper Thin Films Under Different Temperat...	71
8.1 Introduction	9
8.2 Experimental Detail	10
8.3 Results	10
8.4 Conclusions	13
References	13
Chapter 9: Effect of Current Density and Magnetic Field on the Growth and Morphology of Nickel Nanowires	78
9.1 Introduction	9
9.2 Experimental Details	10
9.3 Results and Discussions	10
9.3.1 Scanning Electron Microscopy	13
9.3.2 X-Ray Diffraction and EDS	34
9.4 Concluding Remarks	39
References	13

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